起订量:
8寸快速退火炉
免费会员
生产厂家量伙半导体设备(上海)有限公司成立于2018年,位于上海市浦东新区。公司专注于半导体芯片设备的研发、生产和销售,为半导体芯片制造行业提供可靠的设备和高质量的服务、
公司在安徽合肥设有研发、生产基地,在北京、西安设有办事处。
公司自主研发的快速退火炉RTP具有出色的技术水平,已在Fab厂、研究所、高校等芯片生产单位得到广泛应用。
Larcomse Equipment (Shanghai) Co., Ltd. was established in 2018 and is located in Pudong New Area, Shanghai. The company focuses on the R & D, production and sales of semiconductor chip equipment, providing high-end equipment and high-quality services for the semiconductor chip manufacturing industry
The company has R & D and production bases in Hefei, Anhui Province, and offices in Beijing and Xi'an.
The rapid annealing furnace RTP independently developed by the company has the leading technical level in China and has been widely used in fab factories, research institutes, universities and other chip production units.
设备主要规格(Features):
1.全自动操作模式;
2.Robot取放片;
3.适应于 6英寸-8英寸 Wafer;
4..冷却方式包括水冷和氮气吹扫;
5.MFC控制,3-5路制程气体;
6.SEMI认证。
设备主要工艺应用(Application):
快速热处理(RTP),快速退火(RTA),快速热氧化(RTO),快速热氮化(RTN);
离子注入/接触退火;
高温退火;
高温扩散。
金属合金;
热氧化处理;
设备主要应用领域(Field):
化合物半导体(砷化镓、氮化物、碳化硅等);
多晶硅;
太阳能电池片;
MEMS;
功率器件;
IC晶圆;
LED晶圆。
RTA:Rapid Thermal Annealing 快速热退火。
RTO:Rapid Thermal Oxidation 快速热氧化,主要用于生长薄绝缘层。
RTN:Rapid Thermal Nitridation 快速热氮化。