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Besi Esec 2100芯片焊接机

时间:2017-08-12      阅读:2454

Besi Esec 2100 sD PPPplus 芯片焊接机

 

The Esec 2100 sD PPPplus is the only real Two-in-One Die Bonder on the market. Its instant switching capability between parallel and standard production mode guarantees to produce always highest quality at lowest cost per die placement. Special handling and operating aspects of stacked die are incorporated in the revolutionary machine concept. Further redefining Stacked Die Bonding. For your benefit.

Key Features

10 µm Accuracy @ 3 Sigma (film based applications in Parallel Production Mode)

  • Parallel Pick & Place for parallel picking and bonding
  • Revolutionary Phi-Y pick and place
  • Stable high accuracy thanks to vibration control
     

Widest Application Range

  • Two-in-One machine concept for instant switching between standard and parallel mode provides always the best possible performance from epoxy to the most advanced stacked die applications
  • Patented ultra thin die pick up solutions
  • 50 N bond force standard
  • Up to 125 mm substrate width
     

Shortest Time to Yield

  • Recipe transfer from machine to machine
  • Operator independent results due to auto calibration concept
  • Tool-less exchange of expansion unit in less than 30 seconds
     

Highest Up Time

  • 4 live camera pictures on display at all time
  • Strip and magazine viewers
  • Online help
  • Easy maintainability 
     

Platform of the Future

  • Third process station for additional process expansions
  • Expandable for the future thanks to revolutionary machine concept
Bonding methodEpoxy and DAF
Cycle time265ms (Standard mode)
Bonding accuracyDown to 10 µm @ 3σ (in Parallel Mode)
Wafer size4" to 12" (on 8" or 12" wafer frames)
Die size0.25 mm (with Small Die Kit) to 20 mm
Strip dimensionsLength: 90 mm to 300 mm
Width: 20 mm to 125 mm
Machine dimensions1785 x 1448 x 1400 mm (W x D x H)

Substrate Handler

  • Dual Input (MHIN and TOS)
  • Magazine Handler Input (MHIN only)
  • Raildownholder
  • Motorized Downholder Disp/Bond
  • Strip Marking Unit
  • Striphandler 125 mm hot taped QFN
  • Striphandler 137 mm hot Stage Z
  • SMEMA Link Input
  • SMEMA Link Output
     

Dispenser

  • PDS Epoxy Level Detection
  • PDS Purge and Pre-Dispense Station
  • Multi Dispense Process
     

Pick & Place

  • Fusion Bond Process
  • Massflow Die Sensor
  • Small Die Kit
  • High Accuracy Mode
      

Die Ejector

  • Ultra Thin Die Needle Module
  • Ultra Thin Die Peel (CSR required)
  • Ultra Thin Die Multidisc (CSR required)
     

Vision

  • Indirect Illumination (BVI/DVI)
  • Dispense Vertical Indirect Illumination (DVIILL)
  • Dispense Quality Check
  • Bond Quality Check
  • Bond Vertical Indirect Illumination (BVIILL)

Automation

  • Wafer Mapping inclusive Conversion
  • Host Communication Interface
  • E142 Strip Mapping (CSR required)
     

Miscellaneous

  • Uninterruptible Power Supply to PC
  • Ionizer Pick
  • Ionizer Bond
  • Ionizer Controlled Pick (IONC-P)
  • Ionizer Controlled Bond (IONC-B)
  • Ionizer Controlled Dispense (IONC-D)
  • Ionizer Controlled WH Load Top (IONC-WT)
  • Ionizer Controlled WH Load Bottom (IONC-WB)
  • Ionizer Controlled Magazine Input (IONC-MHIN)
  • Fine Filter Unit
  • Fine Filter Unit with Air Particle Sensor
  • Mini System for training
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