4020系列BIRD功率传感器原理结构

感应器把某种形式的能量转换成另一种形式的能量。有两类:有源的和无源的。

有源感应器能将一种能量形式直接转变成另一种，不需要外接的能源或激励源。

无源感应器不能直接转换能量形式，但它能控制从另一输入端输入的能量或激励能，感应器承担将某个对象或过程的特定特性转换成数量的工作。其"对象"可以是固体、液体或气体，而它们的状态可以是静态的，也可以是动态(即过程)的。对象特性被转换量化后可以通过多种方式检测。对象的特性可以是物理性质的，也可以是化学性质的。按照其工作原理，它将对象特性或状态参数转换成可测定的电学量，然后将此电信号分离出来，送入感应器系统加以评测或标示。适用于半导体的生产和科研领域，读 数误差+/-3%

● 采用液晶背光显示，可对正反向功率 及驻波比等进行三位半数字显示

● 功率测试范围可人工或自动设置，并有 GPIB和RS-232接口供选择

功率范围: 100mW-10kW

频率范围: 100kHz-2.5GHz

驻波比范围: 1.0-199.9

读数误差: ±3%

功能: 测量正反向功率，通过W和dBm显示:测量驻波比及回波损耗，通过dB显示; 以及测量最大最小值 显示: 三位半液晶背光显示

工作电源: AC和电池两种，115/230AC，50/60Hz或8节1.2V镍镉电池

尺寸: 312X309X108mm

接口选项: IEEE-488接口或RS-232接口

BIRD(鸟牌)4421功率计

Precision Power Meter for Semiconductor Processing Applications

• ±1% uracy - plished through the use of sensors with an

automatic frequency compensation scheme, where the error contributions

due to directional coupler frequency response characteristics are

eliminated.

• Wide Dynamic Range - The instrument will meet the full uracy

specification over a 35 dB dynamic range.

• Excellent Measurement Repeatability - Typically <0.1%

• Digital Display - Along with automatic VSWR calculation

• Computer Interface - RS-232 and IEEE-488 standard

The Bird® Model 4421 is a precision RF power meter that, while

originally intended for general purpose laboratory applications where

high uracy is required, has found wide eptance in semiconductor

processing applications. The product is configured as a system,

consisting of the Model 4421 digital display and a precision power

sensor selected for the application based upon maximum power

and operating frequency.

MODEL 4421 MULTIFUNCTION POWER METER

Power Range: 100 mW to 25 kW FS

Frequency Range : 100 kHz - 1 GHz

VSWR Range: 1.0 - 199.9

4020系列BIRD功率传感器原理结构

Functions : Forward and reflected power in W or dBm, VSWR,

return loss in dB and min./max. values

Overrange : Audible warning when RF power input exceeds

120% of sensor's maximum power range

Indication Display: 3 1/2 digit-liquid crystal display with indicator

for mode, measurement units, battery condition,

programming status, and trend arrows.

Switchable backlight.

Operating Power : 115/230 VAC, 50/60 Hz or 8 nickel metal hydride

1.2 V cells (NEDA type 10014)

Nominal Size : 12 9/32" L x 12 5/32" W x 4 1/4" H

(312 mm x 309 mm x 108 mm)

with handle extended 15 7/16" L (392 mm)

Weight : 11 lbs. (5 kg.)

Interconnects: 1 meter latch-n-lock coiled cable

Interfaces: IEEE-488 and RS-232 standard

Dimensions : 4 1/2" x 6 1/2" (114 x 165 mm)

Required Product: RF Power Sensor

essories: Case 4300A215 (page 43)

19” Panel Mount Kit 4421-250

Latch & Lock Case 4421-038