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SEM主动隔振平台SEM base LP
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详细信息
赛默飞世尔定制版SEM主动隔振平台SEM Base LP
Overview
SEM-Base LP is a custom, low profile version of our standard SEM-Base active piezoelectric vibration cancellation platform. SEM-Base LP is easier to install, provides outstanding performance, and is ergonomically optimized. The compact design facilitates installation without lifting the Scanning Electron Microscope (SEM) column with anything other than the SEM’s built-in leveling feet. And, once installed, the SEM’s height above the floor does not increase. SEM-Base LP incorporates our unique STACIS piezo technology and has the same vibration cancellation performance as our industry-standard SEM-Base VI. SEM-Base LP includes casters and is designed specifically to integrate with many Thermo Fisher Scientific (formerly FEI) tools.
Example of how SEM-Base LP integrates with the bottom frame of the tool
Compatible Thermo Fisher Tool Models
SEM-Base LP is compatible with many Thermo Fisher Scientific models including:
▪ Apreo
▪ Aquilos
▪ Helios Small DualBeam
▪ Nova NanoSEM x50
▪ Quattro S
▪ Scios
▪ Teneo
▪ Verios G4
▪ Verios 460, 460L
▪ Versa 3D
If your SEM/FIB is not listed, contact TMC to check for compatibility.
The SEM-Base Advantage
Hard-Mount Technology – SEM-Base is compatible with internal SEM vibration control systems and aggressively mitigates low frequency floor vibration starting at 0.6 Hz.
Active Inertial Vibration Cancellation – SEM-Base uses high sensitivity, low frequency inertial velocity sensors to achieve high levels of vibration attenuation, even on quiet floors.
Serial Design with Piezoelectric Technology – The unique serial design and proprietary highforce piezoelectric technology results in a wide active bandwidth from 0.6 Hz to 150 Hz and unmatched, inertial active vibration cancellation with 90% reduction starting at 2 Hz.
Performance
1800 lbs (818 kg) payload tested with simulated vibration at VC-C (500 μin./s, 12.5 μm/s RMS)
Specifications
Performance Specifications
| Active degrees of freedom | 6 |
| Active bandwidth | 0.6 Hz - 100 Hz |
| Passive natural frequency | 12 Hz nominal |
| Effective active resonant frequency | 0.5 Hz |
| Isolation at 1 Hz | 40% - 70% |
| Isolation at 2 Hz | 90% |
| Isolation at ≥3 Hz | 90-98% |
| Internal noise | <0.1 nm RMS |
| Operating load range | 900 - 2,500 lbs (408 - 1134 kg) |
| Magnetic field emitted at maximum 4 in.(102 mm) from the platform | <0.02 μG broadbａnd RMS |
Design, Dimensions, and Environmental and Utility Requirements
| Environmental and safety | CE and RoHS compliant |
| Active isolation elements | High-force piezoelectric actuators that receive signal from a high-voltage amplifier with an output of up to 800 VDC |
| Passive isolation element | single stiff elastomer (no compressed air supply required) |
| Vibration sensor elements | Downward facing geophone type inertial sensors that measure floor vibration below the isolator and deliver voltage proportional to the velocity of vibration motion |
| Active feedback control loop | Floor vibration is measured, processed and attenuated below the spring supporting the isolated surface |
| Dimensions (WxD) | 33.3 x 34.9 in. | 846 x 887 mm 41 x 34.9 in. | 1041 x 887 mm total with casters |
| Height | 5.26 in. (134 mm) nominal, doesn't change when SEM-Base is switched off |
| Operating temperature | 50° - 90° F 10° - 32° C |
| Storage temperature | -40° - 130° F -40° - 55° C |
| Humidity | < 80% @ 68° F | 20° C |
| System power requirements | 100, 120, 230, 240 VAC 50/60 Hz AC; <600 W CE compliant |
| Floor displacement | <800 μin. (20 μm) below 10 Hz |
Controller Specifications
| Processor | 150/75 MHz dual core |
| Sampling rate | 10 kHz |
| Analog outputs | 16 channels |
| Analog inputs | 16 channels |
| Status light | single LED |
| Front panel ports | 1x serial USB 2.0 1x serial Micro-USB 1x Ethernet RJ-45 2x BNC |
| User interface | Front panel LCD display Character menu on HyperTerminal Extended GUI for Microsoft Windows Embedded Ethernet GUI |
