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ES640 Charged Device Model (CDM) Test System
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详细信息
ES640 Charged Device Model (CDM) Test System
1. Introduction
Charged Device Model (CDM) electrostatic discharge is a common cause of microelectronic circuit failure. Sensitive devices can be seriously damaged or destroyed by a CDM discharge at relatively low voltage. This often occurs when the static charged device contacts a metal surface at a different potential. Such an electrostatic discharge often has an extremely fast rise time.
The Model ES640 is a robotic CDM (Charged Device Model) tester designed to meet all popular CDM ESD test methods, allowing both field induced air discharge methods (FICDM) and relay based contact discharge methods (LI-CCDM, CC-TLP, RP-CCDM). The system includes a computer, environment-controlled chamber, precision XYZ motion system, different types of CDM tester modules, and an automated test and data analysis software.
Here is a comparison between ESDEMC ES640 CDM Solution to others, including Thermo Scientific Orion3 CDM tester .
2. Features
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High resolution cameras (up to 3) allow for easy pin alignment operation
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High resolution motion control system (down to 1 µm step)
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Allows multiple devices being tested in a batch
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Patent-pending CCDM method allows better repeatability
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Airtight environment chamber increases drying unit efficiency
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Support regenerative drying unit (no need of nitrogen)
3. Applications
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General charged device model (CDM) system for package and wafer level tests
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Support many popular latest CDM methods:
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ANSI/ESDA/JEDEC JS-002 (FICDM)
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AEC Q100-011 Rev-D (2019 Ver. follows JS-002)
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AEC Q101-005 Rev-A (2019 Ver. follows JS-002)
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ANSI/ESD SP5.3.3 (LI-CCDM, vf-TLP required)
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CC-TLP (ESDA SP pending, vf-TLP required)
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Patent pending RP-CCDM method
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Legacy and customized solutions available upon request
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Customizable dimension for robotic CBM (Charged Board Model) and flat panel ESD test
4. Specifications
| Parameters | ES640-150 | ES640-300 | Units | Comments |
| Max XY Motion Area | ≥ 150 X 150 | ≥ 300 X 300 | mm | Probe motion area, customizable |
| Max DUT Area | 160 X 160 | 375 X 425 | mm | MAX Field plate area for DUT |
| Field Plate Area | 210 X 210 | 395 X 470 | mm | Field plate area |
| Z Travel | ≥ 50 | mm | ||
| Min X, Y, Z Step Size | 100 | nm | ||
| Reposition Repeatability | ≤ ±6 | μm | ||
| Test Voltage Range | ±1 to 2000 or 4000 | V | Default 2000V, customizable | |
| Test Voltage Step | 1 | V | ||
| Test Voltage Accuracy | ± 1% ± 0.1V | % V | ||
| XY Vision Resolution | 1920 X 1080 | Pixel | ||
| Vertical Vision Resolution | 2592 X 1944 | Pixel | ||
| Operating Temperature | 10 to 40 | (°C) | ||
| Operating Humidity (RH) | 0 to 80 | % | ||
| Power | 120-240 VAC, 50/60 Hz | VAC | ||
| N2 or CDA Pressure | 10 – 120 | PSI | ||
| N2 or CDA Peak Usage | 0.2 | cfm | (or 0.34 m3h) | |
| 300 N2 Tank Avg Usage | ~ 19 | hour | Continuous @ 40RH environment | |
| Desiccant Avg Usage | ~ 24 | hour | Continuous @ 40RH environment | |
5. Ordering Information
ES640 Charged Device Model (CDM) Test System
| Line | Part # or Option # | Description |
| ES640 Charged Device Model (CDM) Test System | ||
| 1.1 | ES640-150 | Universal CDM platform, 150 X 150 mm Test Area, 2 kV |
| 1.2 | ES640-300 | Universal CDM platform, 300 X 300 mm Test Area, 2 kV |
| 1.3 | ES640-HC | Humidity Conditioning Unit for Air Discharge Methods (Uses reusable desiccants, lower cost of usage than N2 or CDA) |
| 1.4 | ES640-CV4 | Charge Voltage Upgrade from 2kV to 4 kV |
| ANSI/ESDA/JEDEC JS-002 Standard Related Test Solution (Followed standards include AEC_Q100-011D, AEC_Q101-005A) | ||
| 2.1 | ES640-JS002 | JS-002 Solution – System Integration Package (Including One ES640-JS002-1 Test Fixture) |
| 2.2 | ES640-JS002-C | JS002/C101 Calibration Disc (6.8 pF and 55 pF) |
| 2.3 | ES640-JS002-1 | JS-002 Test Fixture #1 (Discharge Tip 250 µm, body diameter 350 µm) |
| 2.4 | ES640-JS002-2 | JS-002 Test Fixture #2 (Discharge Tip 120 µm, body diameter 200 µm) |
| ANSI/ESD S5.3.1-2009 Standard Related Solution (Not recommend for new designs) | ||
| 3.1 | ES640-S09-F | ANSI/ESD S5.3.1-2009_FI-CDM Discharge Unit |
| 3.2 | ES640-S09-D | ANSI/ESD S5.3.1-2009_D-CDM Discharge Unit |
| 3.3 | ES640-S09-C | ANSI/ESD FR4 Calibration Module (4 and 30 pF) |
| 3.4 | ES640-J13 | JEDEC-JESD22-C101F-2013 FI-CDM Discharge Unit |
| RP-CCDM Contact First CDM Solutions (New methods for discharge stability improvements, not standardized yet) | ||
| 4.1 | ES640-RPCCDM | ESDEMC Patented Contact First CDM Solution
(Very repeatable contact first method, meets JS002 requirement, not require VF-TLP) (Including one ES640-PRCCDM-P1 Discharge Unit) |
| 4.2 | ES640-RPCCDM-P1 | RP-CCDM Discharge Unit for Packaged Device |
| 4.3 | ES640-RPCCDM-W1 | RP-CCDM Discharge Unit for Bare-die & Wafer Device |
| LI-CCDM Contact First CDM solution | ||
| 5.1 | ES640-LICCDM | LI-CCDM Discharge Solution – System Integration Package (Including one ES640-LICCDM -P1 Discharge unit, require VF-TLP) |
| 5.2 | ES640-LICCDM-P1 | LI-CCDM Discharge Unit for Packaged Device |
| 5.3 | ES640-LICCDM-W1 | LI-CCDM Discharge Unit for Bare-die & Wafer Device |
| 5.4 | ES640-vfTLP | VF-TLP module for CC-TLP or LI-CCDM Method (This VF-TLP module is a compact VF-TLP for the ES640 system. The default configuration is 1 rise-time + 1 pulse-width with limited expansion capability. If more pulse shape options are needed, model ES622 TLP/VF-TLP is the best option) |
| CC-TLP Solution | ||
| 6.1 | ES640-CCTLP | CC-TLP Solution – System Integration Package (Including 1 set of ES640-CCTLP-1-50 & calibration gauge) |
| 6.2 | CC-TLP-1-50 | CC-TLP Discharge Unit with 50m OD GND Plate |
| 6.3 | CC-TLP-1-100 | CC-TLP Discharge Unit with 100m OD GND Plate |
| 6.4 | CC-TLP-1-Cal | CC-TLP calibration gauge for needle height |
| Third Party Instruments for CDM System | ||
| 7.1 | MISC-OSC2G | Digital Oscilloscope (2 GHz, 20 Gs) |
| 7.2 | MISC-OSC6G | Digital Oscilloscope (6 GHz, 20 Gs) ES640 Charged Device Model (CDM) Test System |
