纳米位移台,纳米位移台参数-成都光驰科技有限公司

详细介绍

纳米位移台

A.组装后效果及参数

· XYZ travel: 12x12x12 mm

· Cryogenic + Non-magnetic

· Load, max: 2 kg

B,单轴参数

Precision Piezo Stage PPS-20

The PPS-20 is a high-precision, long travel linear piezo stage. Miniature crossed roller bearings assure high stiffness and guiding accuracy for loads up to 20 N （horizontal orientation）. It utilizes our patent-pending multi-phase piezo motor resulting in high speed （> 2 mm/s） and high blocking force （> 2 N）. The PPS-20 is available in open loop or with an external encoder. Closed-loop resolution of 2 nm is achievable. Versions capable of operation in vacuum （10^-9 mbar） and/or cryo （4 Kelvin） are available. The PPS-20 is compatible with the MMC-100 and MMC-110 controllers.

Key features

· Travel: 12 - 51 mm

· Load, max: 2 kg

· Speed, max: 2 mm/s

· Resolution, typical: 2 nm

· Repeatability, bi-directional: ± 20 nm

· Repeatability, uni-directional: 20 nm

· Encoder Options: Analog, Digital

Travel Dependent Specifications
Travel range [mm]	12	18	26	38	51
Straightness/Flatness [µm]	± 1	± 1.5	± 1.5	± 2	± 2.5
Pitch [µrad]	± 60	± 80	± 80	± 90	± 100
Yaw [µrad]	± 70	± 90	± 90	± 100	± 100
Weight [g]	17	24	34	51	68

Motor Compatibility
Motor option	Piezo Motor, PM-002
Speed, max [mm/s]	2 （MMC-100）, 10 （MMC-110）

Motor/Feedback Dependent Specifcations
Encoder option	None （open loop）	Analog （1 Vpp）	Digital （RS-422）
Resolution, typical [nm]	1	10	2
Repeatability, bi-directional [nm]	n/a	± 50	± 20
Repeatability, uni-directional [nm]	n/a	50	20
Accuracy [µm]	-	± 1	± 1

Load Characteristics
Orientation	Fx [N]	Fy [N]	Fz [N]	Mx [N·m]	My [N·m]	Mz [N·m]
Load, max	2	20	20	0.7	0.7	0.7

C, 控制器

Modular Motion Driver MMD-100

· Driver for stick-slip, multi-phase piezo stages

· Open loop resolution down to 1 nm

· Closed loop resolution down to 2 nm

· MMD-100 and MMC modules can be mixed in a stack

· Pulse and direction input signals via mini-DIN connector

生产厂商: 美国MICRONIX

产品简介

详细介绍

常用功能直达