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The PELCO® Silicon Nitride Support Films for TEM (also called Si3N4 TEM membranes) have been developed as an addition to our extensive range of TEM support films to further enable nanotechnology applications and extend molecular biology research. These superior products are made by state-of-the-art semiconductor and patented MEMS fabrication techniques using resilient, low-stress inorganic silicon nitride thin films supported by a sturdy silicon frame. PELCO® Silicon Nitride Support Films are available in four window sizes combined with either 8, 15, 35, 50nm, or 200nm thin membrane thickness on an EM industry standard 3mm diameter round frame, making them the most desirable and useful silicon nitride support films in the current marketplace. Go to Product Overview and Manufacturing Details for more information
Silicon Nitride Support Films have the advantages of being chemically and mechanically robust and can withstand temperature changes up to 1000°C. They are extremely stable and suitable to conduct a variety of nanotechnology experiments with particles or cells mounted directly on the support films.
The PELCO® Silicon Nitride Support Films are indispensable tools for virtually all fields of nanotechnology research. They enable direct deposition and in situ observations of dynamic reactions over a wide temperature range. The support film can be used as a passive support film but can also play a role as an active participant in experiments.
Hydrophobic and Hydrophilic Substrates have been added for nanotechnology and biotechnology applications. The ultra-low-stress 15nm, 50nm, and 200nm membranes have been Atomic Layer-Deposited (ALD) to create these surfaces: go to Hydrophobic / Hydrophilic support films.
Iron nanoparticles dispersed on a SiN support film and oxidized at 350°C while supported on the PELCO® SiN support films. The image shows the product of the oxidization process: hollow iron oxide nanoparticles.
Haitao Liu, Dept. of Chemistry, UC Berkeley, California.
PELCO® Silicon Nitride Support Films are manufactured using state-of-the-art semiconductor and MEMS manufacturing techniques. The Silicon Nitride Support Film is grown on a silicon wafer to the desired membrane thickness of 8, 15, 35, 50, or 200nm. The specimen viewing area is created by etching away a window in the silicon substrate, leaving a perfectly smooth, resilient and chemically robust silicon nitride film. The frame is manufactured as a 3mm silicon disc with smooth EasyGrip™ edges for easy manipulation by tweezers and will fit perfectly in standard TEM holders. Standard thickness of the silicon frame is 200µm which will fit most TEM holders. A special version with a 50µm thickness and a 0.25 x 0.25mm window is available for special TEM holders which only accommodate thinner supports. Easy handling capabilities and smoothness of the edges are design advantages over other brands of silicon nitride support films. The PELCO® Silicon Nitride Support Films are manufactured like grids and are compley free from debris particles. The mechanical and chemical stability allow for cleaning of the Silicon Nitride Support Films with chemicals (solvents, acids and bases), glow discharge and plasma cleaning. It is recommended that ultrasonic cleaning not be used, as it can easily shatter the Silicon Nitride Support Films. |
Monte Carlo simulations showing less absorption and less scattering in 50nm Silicon Nitride Support Films; Advantage - PELCO®50nm film thickness gives superior imaging and analysis results. |
Advantages of the PELCO® Silicon Nitride Support Films
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Applications Fields:
Product Description
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Prod # | Description | Unit |
8nm membrane thickness / 25 apertures / 200µm frame thickness | ||
21510-10 | Silicon Nitride Support Film, 8nm, 60x60µm Apertures (25) on 0.5x0.5mm Window | pkg/10 |
15nm membrane thickness / 200µm frame thickness | ||
21560-10 | Silicon Nitride Support Film, 15nm with 0.25x0.25mm Window | pkg/10 |
21568-10 | Silicon Nitride Support Film, 15nm with 2 each 0.1x1.5mm Windows | pkg/10 |
21569-10 | Silicon Nitride Support Film, 15nm with 9 each 0.1x0.1mm Windows | pkg/10 |
35nm membrane thickness / 25 apertures / 200µm frame thickness | ||
21515-10 | Silicon Nitride Support Film, 35nm, 70x70µm aperture (25) on 0.5x0.5mm Window | pkg/10 |
50nm membrane thickness / 200µm frame thickness | ||
21505-10 | Silicon Nitride Support Film, 50nm with 0.25x0.25mm Window | pkg/10 |
21505-100 | Silicon Nitride Support Film, 50nm with 0.25x0.25mm Window | pkg/100 |
21500-10 | Silicon Nitride Support Film, 50nm with 0.5x0.5mm Window | pkg/10 |
21500-100 | Silicon Nitride Support Film, 50nm with 0.5x0.5mm Window | pkg/100 |
21501-10 | Silicon Nitride Support Film, 50nm with 0.75x0.75mm Window | pkg/10 |
21501-100 | Silicon Nitride Support Film, 50nm with 0.75x0.75mm Window | pkg/100 |
21502-10 | Silicon Nitride Support Film, 50nm with 1.0x1.0mm Window | pkg/10 |
21502-100 | Silicon Nitride Support Film, 50nm with 1.0x1.0mm Window | pkg/100 |
21504-10 | Silicon Nitride Support Film, 50nm with 0.5x1.5mm Window | pkg/10 |
21504-100 | Silicon Nitride Support Film, 50nm with 0.5x1.5mm Window | pkg/100 |
21508-10 | Silicon Nitride Support Film, 50nm with 2 each 0.1x1.5mm Windows | pkg/10 |
21509-10 | Silicon Nitride Support Film, 50nm with 9 each 0.1x0.1mm Windows | pkg/10 |
200nm membrane thickness / 200µm frame thickness | ||
21525-10 | Silicon Nitride Support Film, 200nm with 0.25x0.25mm Window | pkg/10 |
21525-100 | Silicon Nitride Support Film, 200nm with 0.25x0.25mm Window | pkg/100 |
21520-10 | Silicon Nitride Support Film, 200nm with 0.5x0.5mm Window | pkg/10 |
21520-100 | Silicon Nitride Support Film, 200nm with 0.5x0.5mm Window | pkg/100 |
21521-10 | Silicon Nitride Support Film, 200nm with 0.75x0.75mm Window | pkg/10 |
21521-100 | Silicon Nitride Support Film, 200nm with 0.75x0.75mm Window | pkg/100 |
21522-10 | Silicon Nitride Support Film, 200nm with 1.0x1.0mm Window | pkg/10 |
21522-100 | Silicon Nitride Support Film, 200nm with 1.0x1.0mm Window | pkg/100 |
21524-10 | Silicon Nitride Support Film, 200nm with 0.5x1.5mm Window | pkg/10 |
21524-100 | Silicon Nitride Support Film, 200nm with 0.5x1.5mm Window | pkg/100 |
21528-10 | Silicon Nitride Support Film, 200nm with 2 each 0.1x1.5mm Windows | pkg/10 |
21529-10 | Silicon Nitride Support Film, 200nm with 9 each 0.1x0.1mm Windows | pkg/10 |
21570-10 | Silicon Nitride Support Film, 50nm on 50µm frame thickness with 0.25x0.25mm Window | pkg/10 |
21578-10 | Silicon Nitride Support Film, 50nm on 50µm frame thickness with 2 each 0.1x1.5mm Windows | pkg/10 |
21579-10 | Silicon Nitride Support Film, 50nm on 50µm frame thickness with 9 each 0.1x0.1mm Windows | pkg/10 |
with various membrane thicknesses and sizes
The Silicon Nitride Assortment Pack is the ideal way to determine which membrane thickness or size of silicon nitride or silicon dioxide is the optimum product for your application. The assortment pack includes the following thickness and window sizes on 200um thick silicon frames:
Position In Grid Box | Unit | Membrane Type |
1A | 1 ea | Si3N4 15nm membrane with 0.25x0.25mm window |
1B | 1 ea | 1 ea Si3N4 15nm membrane with 0.25x0.25mm window |
1C | 1 ea | 1 ea Si3N4 50nm membrane with 0.25x0.25mm window |
1D | 1 ea | 1 ea Si3N4 50nm membrane with 9 ea 0.1x0.1mm windows |
1E | 1 ea | Si3N4 50nm membrane with 0.5x0.5mm window |
2A | 1 ea | Si3N4 50nm membrane with 0.75x0.75mm window |
2B | 1 ea | Si3N4 200nm membrane with 0.25x0.25mm window |
2C | 1 ea | Si3N4 200nm membrane with 0.5x0.5mm window |
2D | 1 ea | SiO2 40nm membrane with 0.5x0.5mm window |
2E | 1 ea | Holey Si3N4 200nm membrane with 2.5µm holes with 0.5x0.5mm window |
Prod # | Description | Unit |
21597-10 | Silicon Nitride Assortment Pack (10 different membranes) | each |