E-Beam Lithography Mount电子束光刻机

The E-Beam Lithography Mount comprises 2 PELCO SEMClips™ to hold the sample, a Faraday （ø2.5mm with 100µm hole） cup to measure the beam current and gold on carbon resolution sample for resolution test （ø3mm） all on a 25mm aluminum pin stub, positioned in such a way to leave maximum sample space. The Gold on Carbon is similar to #617 with gold particle size range from approx. 5nm to 150nm. Shipped in plastic storage box. Pin length is 8.5mm. Material: Aluminum with copper clips and brass screws.