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ATF6 SWIFT Sensor
高级会员第8年
代理商西努光学创建于2003 年,主营工业显微镜及制样设备、镜片测定设备,高速摄像系统、工业内窥镜、机器视觉等工业及科研应用的检测设备及系统集成。
西努光学秉承“以光学为核心,为客户提供解决方案”的经验思路,经过16年的努力,成为众多企业、高校科研单位提供各种专业化的光学系统解决方案。并于2012 年导入SAP 管理系统,通过系统资源整合,为客户提供更优质、快捷的专业化服务。
2016 年,我们积极引进检测设备的同时导入制样等配套设备以丰富我们实验室平台,以更好的为客户提供现场体验,从微米到纳米满足客户从制样到结果分析的一站式体验服务。
ATF6 SWIFT Sensor
WDI’s ATF6 SWIFT is a high speed, high accuracy, autonomous digital autofocus sensor. Its “Smart Sensor Architecture” (SSA) incorporates a semiconductor laser, built-in CMOS image sensor, FPGA and microprocessor for fast digital image processing. By projecting a laser line onto the sample and digitally processing the image, the ATF6 provides extremely fast and accurate measurements of the distance and direction to focus. This information can then be output directly to WDI’s MCM+ or MCZ controller, or to any compatible controller.
High Accuracy At Fast Speeds
WDI’s ATF6 SWIFT sensors project their focusing laser directly through the objective lens of the microscope. This “Through The Lens” (TTL) technique allows the ATF6 SWIFT to provide extremely accurate autofocus, with a success rate typically higher than 99%. The on-board digital processing coupled with an improved faster sampling rate allows it to maintain this accuracy with 3 times the speed of previous versions.
Static or Dynamic Autofocus
The ATF6 SWIFT is continually assessing distance and direction to focus, updating its data every 0.15 milliseconds. This allows the sensor to keep samples in focus regardless of whether they are stationary or in high speed motion.
Maximum Flexibility
By projecting a laser line, the AFT6 SWIFT sensor operates equally effectively on patterned and un-patterned specimens as well as diffusing and reflective surfaces making it ideal for media such as TFT arrays, photo masks and semiconductor wafers. The sensor also automatically adjusts its laser intensity and sensor expose time, allowing it to adapt from low reflectivity (down to 1%) to highly reflective (99%) surfaces. It is compatible with objectives from 2X to 100X, and
wavelengths including UV, NUV and NIR. The ATF6 SWIFT can also achieve focusing with a programmable Z offset function.
Easy Integration
All of the sensors in WDI’s ATF family are designed with ease of integration in mind. The ATF6 SWIFT can be purchased as either a stand-alone (SA) sensor with analog output, or as a full autofocus system (SYS), integrated with either WDI’s MCM+ controller for driving an external Z stage or MCZ controller which includes the ability to drive a two-phase stepper motor for Z actuation. All WDI’s ATF sensors have small, standardized footprints and connections, and can output in either analog or digital formats, making them both easy to install and easy to upgrade as application requirements evolve. The AFT6 SWIFT is also available in specially designed configurations; one for LCD inspection/repair, another designed for the unique requirements of OLED, LTPS & IG70 panel inspection and other suited for cell and module repair.
ATF6 SWIFT Sensor AUTO FOCUS & TRACKING SYSTEM
Structured Light Pattern | Line Segment |
Sensor Wavelength | Choice of 510nm, 660nm or 785nm |
Image Detector | Area Scan CMOS |
Internal Update Rate | 20kHz |
Static Autofocus Accuracy | ± 1/4 Objective Depth of Field |
Fast Tracking Autofocus Accuracy | ± 1/2 Objective Depth of Field |
General Performance | |
Output Data Rate6.5kHz6.5kHz | 6.5kHz |
Reflectivity Adaption Delay | 1ms |
Laser Type | Semiconductor |
Laser Safety | Class 2 510, 660, 785nm |
Weight | 250g |
Dimensions | 40 X 40 X 120mm |
Maximum Cable Length | 1.8m |
Compliance | CE SEMI |
External Requirements | |
Specimen Reflectivity | 1% ~ 99% |
Glass Thickness | > 0.5mm |
Diffusing Specimen | Yes |
Specular Specimen | Yes |
Specular Specimen | Yes |
Textured Specimen | Yes |
Operating Specifications | |
Input Voltage | 18V ~ 25V, 24V Nominal |
Operating Temperature | 18°C ~ 35°C |
Storage Temperature | 10°C ~ 44°C |
Storage Temperature | 10% ~ 75% Non Condensing |