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ATF5 Sensor
西努光学创建于2003 年,主营工业显微镜及制样设备、镜片测定设备,高速摄像系统、工业内窥镜、机器视觉等工业及科研应用的检测设备及系统集成。
西努光学秉承“以光学为核心,为客户提供解决方案”的经验思路,经过16年的努力,成为众多企业、高校科研单位提供各种专业化的光学系统解决方案。并于2012 年导入SAP 管理系统,通过系统资源整合,为客户提供更优质、快捷的专业化服务。
2016 年,我们积极引进检测设备的同时导入制样等配套设备以丰富我们实验室平台,以更好的为客户提供现场体验,从微米到纳米满足客户从制样到结果分析的一站式体验服务。
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The ATF5 Sensor
WDI’s ATF5 is a high speed, high accuracy, autonomous digital autofocus sensor. Its “Smart Sensor Architecture” (SSA) incorporates a semiconductor laser, built-in CMOS image sensor, FPGA and microprocessor for fast digital image processing. By projecting multiple laser dots onto the sample and digitally processing the image, the ATF5 provides fast and accurate measurements of the distance and direction to focus. This information can then be output directly to WDI’s MCM+ or MCZ controller, or to any compatible controller.
High Accuracy At Fast Speeds
WDI’s ATF5 sensors project their focusing laser directly through the objective lens of the microscope. This “Through The Lens” (TTL) technique allows the ATF5 to provide extremely accurate autofocus, with a success rate typically higher than 99%. The ATF5’s on-board digital processing allows it to couple this accuracy with extremely high speeds.
Static or Dynamic Autofocus
The ATF5 is continually assessing distance and direction to focus, updating its data every 0.6 milliseconds. This allows the sensor to keep samples in focus regardless of whether they are stationary or in motion. This powerful tracking autofocus makes the ATF5 perfect for scanning very large specimens quickly and precisely.
Maximum Flexibility
By projecting multiple reference spots, the AFT5 sensor operates equally effectively on patterned and un-patterned specimens. This makes it ideal for media such as TFT arrays and photo masks. The ATF5 also automatically adjusts its laser intensity and sensor exposure time, allowing it to adapt from low reflectivity (down to 1%) to highly reflective (99%) surfaces. It is compatible with objectives from 2X to 100X, and wavelengths including UV, NUV and NIR. The ATF5 can also achieve focusing with a programmable offset function, allowing inspection of both the top and bottom surfaces of a transparent medium.
Easy Integration
All of the sensors in WDI’s ATF family are designed with ease of integration in mind. They are compatible with most types of infinity corrected microscope objectives. The ATF5 can be purchased as a full autofocus system, integrated with either WDI’s MCM+ controller for driving an external Z stage or MCZ controller which includes the ability to drive a two-phase stepper motor for Z actuation. All WDI’s ATF sensors have small, standardized footprints and connections, and can output in either analog or digital formats, making them both easy to install and easy to upgrade as application requirements evolve.
ATF5 Sensor FOCUS & TRACKING SENSOR
Structured Light Pattern | Seven Dots |
Sensor Wavelength | Choice of 660nm or 785nm |
Image Detector | Line Scan CMOS |
Autofocus Update Rate | 20kHz |
Static Autofocus Accuracy | ± 1/4 Objective Depth of Focus |
Fast Tracking Autofocus Accuracy | ± 1/2 Objective Depth of Focus |
General Performance | |
Output Data Rate | 1.7kHz in tracking mode |
Reflectivity Adaption Delay | 2ms |
aser Type | Semiconductor |
Laser Safety | Class 2 |
Weight | 250g |
Dimensions | 40 X 40 X 120mm |
Maximum Cable Length | 1.8m |
Compliance | CE SEMI |
External Requirements | |
Specimen Reflectivity | 1% ~ 99% |
Glass Thickness | > 0.5mm |
Diffusing Specimen | Yes |
Specular Specimen | Yes |
Patterned Specimen | Yes |
Textured Specimen | Yes |
Operating Specifications | |
Input Voltage | 18V ~ 25V, 24V Nominal |
Operating Temperature | 18°C ~ 35°C |
Storage Temperature | 10°C ~ 45°C |
Humidity | 10% ~ 75% Non Condensing |