运动行程（mm）

Travel (mm)

1000X1200X200

1200X1500X200

1500X2000X200

外形尺寸（长）X（宽）X（高）(mm)

Dimension (L)X(W)X(H)(mm)

1678X2140X1700

1878X2440X1700

2178X2940X1700

重量(kg)

Weight(kg)

2500

4000

5500

测量承重(kg）

Measuring Load (kg)

50

50

50

X/Y 轴测量精度(μm)

X/Y axis Measuring Accuracy

E2(X/Y)=（3+L/200）

光栅尺

Grating ruler

LAMOTION  0.5um高精度金属贴片尺

LAMOTION 0.5um high precision metal patch ruler

导轨

Guide

中国台湾SHAC高精密级直线导轨

Taiwan SHAC high precision linear guide

传动方式

Drive Method

中国台湾TBI高精密级研磨滚珠丝杆

Taiwan TBI high precision grinding ball screw.

CCD

HIKROBOT 130万像素数字相机

HIKROBOT 1.3 million pixel digital camera

光源

Lighting

下轮廓灯

Under contour light

LED 平行轮廓冷光

LED parallel profile cold light

上表面灯

Surface Light

可程式LED五环八分区环形表面冷光源，带激光指示器

Programmable LED five-ring and eight-zone surface cold light source with laser pointer

光学镜头

Optical Lens

原装POMEAS高清晰度自动变倍带同轴光镜头（影像放大倍率28X-180X）

Original POMEAS High-definition automatic zooming coaxial optical len

(image magnification 28X-180X)

马达

Motor

三轴日本进口松下伺服马达

Three-axis original Japan Panasonic servo motor

运动控制系统

Control System

ACT420精准控制系统

ACT420 precision control system

软件

Measuring Software

精准测量软件INSPEC-CNC

Precision measurement software INSPEC-CNC

工作环境

Working Environment

温度20℃±3℃，温度变化<2℃/hr，湿度30～80%

Temperature 20℃±3℃, temperature change<2℃/hr, humidity 30～80%

电源

Power

220V/50Hz/10A

备注：可选配国产/进口探针测头和3D测量软件系统来实现精准测量高度功能。此系列最大行程可做到3000X5000X400（mm），也可以根据客户具体要求非标定制。Optional domestic imported probe measurement header and 3D measurement software system to achieve precise measurement high function.The maximum stroke of this series can reach 3000 × 5000 × 400（mm）. It can also be customized according to the specific requirements of customers.